Review of transition-metal diboride thin films

نویسندگان

چکیده

We review the thin film growth, chemistry, and physical properties of Group 4-6 transition-metal diboride (TMB2) films with AlB2-type crystal structure (Strukturbericht designation C32). Industrial applications are growing rapidly as TMB2 begin competing conventional refractory ceramics like carbides nitrides, including pseudo-binaries such Ti1-xAlxN. The comprises graphite-like honeycombed atomic sheets B interleaved by hexagonal close-packed TM layers. From C32 stems unique high melting point, hardness, corrosion resistance, yet limited oxidation combined electrical conductivity. correlate underlying chemical bonding, orbital overlap, electronic to mechanical properties, resistivity, high-temperature this class materials. highlights importance avoiding contamination elements (like oxygen) boron segregation on both target substrate sides during sputter deposition, for better-defined regardless boride system investigated. This is a consequence strong tendency segregate grain boundaries boron-rich compositions growth flux. It judged that deposition at tipping point towards multitude not solely bulk materials, but also protective coatings electrically conducting stable films.

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ژورنال

عنوان ژورنال: Vacuum

سال: 2022

ISSN: ['0042-207X', '1879-2715']

DOI: https://doi.org/10.1016/j.vacuum.2021.110567